Recent Progress of the Integrated Circuit Industry in China ― Overview of the Manufacturing Industry

Authors: Litho World
Keywords：IC Industry；Manufacturing Industry
doi：10.33079/jomm.20030304

Study on Simulation and Profile Prediction of Atomic Layer Deposition

Authors: Lei Qu, Chen Li, Jiang Yan et al.
Institution：North China University of Technology
Keywords：Atomic Layer Deposition；process simulation；profile model；temperature fitting；film of HfO2
doi：10.33079/jomm.20030303

Recognition and Visualization of Lithography Defects based on Transfer Learning

Authors: Bo Liu, Pengzheng Gao, Libin Zhang et al.
Institution：School of Information, North China University of Technology, Beijing
Keywords：transfer learning；neural network；lithography defects；visualize；Grad-CAM
doi：10.33079/jomm.20030302

Study of Inverse Lithography Approaches based on Deep Learning

Authors: Xianqiang Zheng, Xu Ma, Shengen Zhang et al.
Institution：Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China, School of Optics and Photonics, Beijing Institute of Technology, China
Keywords：Computational lithography；inverse lithography technology (ILT)；optical proximity correction (OPC)；deep learning
doi：10.33079/jomm.20030301