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CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Current Issue • Versions 2 Vol 3 (4) : 20030406 2020
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Material Modeling in Semiconductor Process Applications
Boris A. Voinov, Patrick H. Keys, Stephen M. Cea, Ananth P. Kaushik, Mark A. Stettlerhidden
Received： 2020 - 10 - 01
Accepted： 2020 - 11 - 02
Published： 2020 - 12 - 30
4693 55 0
CSCD  ·  Baidu Scholar
References
Journal of Microelectronic Manufacturing

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