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Vol 3 (2) : 20030201 2020
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FinFET Performance Enhancement by Source/Drain Cavity Structure Optimization
Man Gu
,
Wenjun Li
,
Haiting Wang
,
Owen Hu
DOI:
10.33079/jomm.20030201
: 2020 - 03 - 11
: 2020 - 05 - 28
: 2020 - 06 - 08
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