CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Archive • Versions 1 Vol 3 (1) : 20030105 2020
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A Device Design for 5 nm Logic FinFET Technology
Yu Ding, Yongfeng Cao, Xin Luo, Enming Shang, Shaojian Hu, Shoumian Chen, Yuhang Zhao
： 2019 - 11 - 29
： 2020 - 03 - 30
3077 91 0
CSCD  ·  Badiu Scholar
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Journal of Microelectronic Manufacturing

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