CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Archive • Versions 3 Vol 1 (1) : 18010104 2018
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Analysis of Current Research Status of Plasma Etch Process Model
Xiaoting Li, Rui Chen, Lei Qu, Xuanmin Zhu, Jing Zhang, Yanrong Wang, Shuhua Wei, Jiang Yan, Yayi Wei
： 2018 - 09 - 01
： 2018 - 09 - 30
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Journal of Microelectronic Manufacturing

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