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CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Archive • Versions 2 Vol 1 (1) : 18010103 2018
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A Novel High Volume Manufacturing Method for Defect-free and High-yield SiN Micro-sieve Membranes
Yansong Liu, Chao Zhao, Lisong Dong, Rui Chen, Yayi Weihidden
Received： 2018 - 08 - 22
Published： 2018 - 09 - 30
3374 29 0
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Journal of Microelectronic Manufacturing

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